Provide reliable RTP equipment for compound semiconductors,SlC,LED and MEMS
The semi-automatic Rapid Thermal Processing Machine is a semi-automatic vertical rapid annealing system under protective gas, which heats single wafers or samples with infrared visible light. The process time is short, the temperature control accuracy is high, and it is suitable for 4-12 inch wafers
Industry applications
Oxide, nitride growth
Ohmic contact rapid alloy
Annealing of silicide alloy
Oxidation reflux
Gallium arsenide process
Other rapid heat treatment processe
16 years of experience in equipment export!
We can provide you with a one-stop Semiconductor Front End Processes and Equipment solution!