After-sales Service: | 1 Year |
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Demoulding: | Automatic |
Condition: | New |
Suppliers with verified business licenses
Audited by an independent third-party inspection agency
No. | Project | Specifications | Remarks |
1 |
Equipment Overview |
Device Name: Photomask Cleaner | |
Equipment model: MDLB-MC200 | |||
Overall dimensions (approximately): 1300mm (W) * 1000mm (D) * 1950mm (H) | |||
Whole machine weight (approximately): 300KG | |||
Operating table height: 900 ± 50mm | |||
Substrate size specifications: suitable for 2/4/5/6/8 inch square mask plates | |||
Process flow: manual wafer placement → cleaning (brush, cleaning solution → high-pressure water → megasonic water → deionized water → nitrogen gas drying) → manual wafer removal | |||
Equipment type: semi-automatic, manual loading and unloading | |||
2 |
Equipment construction |
Shell: stainless steel, smooth, corrosion-resistant, easy to clean | |
Cleaning chamber: PP, smooth, corrosion-resistant, easy to clean | |||
Pipeline: PU/PFA matching pipeline is used | |||
Work lighting: anti-corrosion yellow light lighting | |||
Door opening style: Double door with door opening alarm function | |||
Touch screen: 10 inch full-color touch screen * 1 | |||
FFU: Class 100 | |||
Leak proof bottom support: available | |||
3 |
High precision servo motor |
Quantity: 1 | |
Speed: -3000~3000rpm | Empty load | ||
Maximum acceleration of spindle rotation: 3000rpm/S | Empty load | ||
Speed accuracy: ± 1rpm (50rpm~3000rpm) | |||
Speed resolution: 1rpm | |||
4 |
Automatic swing arm | Quantity: 3 | |
Swing arm speed: 1~30 °/S | |||
5 |
Cleaning unit |
Cleaning swing arm: 1 channel of deionized water, 1 channel of nitrogen gas Megasonic Arm: 1 Megasonic, 1 High Pressure Water Brush arm: 1 brush, 1 water, 1 cleaning solution |
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Cleaning method: automatic cleaning | |||
Deionized water suction function: available | |||
Backwash (deionized water): 1 route | |||
Supply method: Cleaning solution: Diaphragm pump Deionized water: supplied directly by the factory |
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Pressure tank with liquid level detection | |||
6 |
Brush brush |
Quantity: 1 (with self-cleaning function) | |
Speed: up to 1000rpm, adjustable speed | |||
Height manually adjustable | |||
7 |
Load tray |
Quantity: 5 | |
Size: Suitable for 2/4/5/6/8 inch square mask plates | |||
Substrate fixing method: Claw fixing method | |||
8 |
Control system |
Control system: using PLC control | |
Program: 100 groups, each group consisting of 100 steps, with a maximum single step time of 3000.0 seconds Resolution: 0.1S |
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The program can be saved, called, modified, and deleted | |||
Set encryption permissions: for device operators, technicians, administrators, and manufacturers respectively | |||
Signal tower type: red, yellow, green 3 colors | |||
9 |
Safeguard |
There is an anti leakage circuit breaker protection device | |
There is a leakage sensor installed at the bottom, and there will be an alarm prompt for machine leakage | |||
There is a reliable grounding device and emergency stop and alarm system | |||
The main components of the whole machine have passed CE, CCC or UL certification, with reliable and stable performance |