LED Laser Optical Communication Photoelectron Semiconductor Lab Research Inductively Coupled Plasma Etching Icp Rie Machine

• After-sales Service: Installation, Training
• Warranty: One Year Warranty
• Type: Electrical Etching Machine
• Model NO.: MD ICP
• Object: Silicon-Based:Si/Sio2/Sinxsic
• Usage: Corrosion & Hollowed-out
• Certification: ISO9001: 2000, CE
• Etching Type: Reactive Ion Etching
• Precision: High Precision
• Condition: New
• Transport Package: Wooden Case
• Specification: 1170*750*1080mm
• Trademark: Minder-Hightech
• Origin: China
• Production Capacity: 10set/Month

Product Description

Inductively coupled plasma etching machine ICP
Inductively coupled reactive ion etching technology is a type of RIE. This technology achieves decoupling of plasma ion density and ion energy by independently controlling ion flux, thereby improving the control accuracy and flexibility of the etching process.
The high-density inductively coupled reactive ion etching (ICP-RIE) series products are based on inductively coupled plasma technology and are aimed at fine etching and compound semiconductor etching needs. It has excellent process stability and process repeatability, and is suitable for applications in silicon semiconductors, optoelectronics, information and communications, power devices, and microwave devices.

Applicable Materials:
1. Silicon-based materials: silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC)...
2. III-V materials: indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN)...
3. II-VI materials: cadmium telluride (CdTe)...
4. Magnetic materials/alloy materials
5. Metal materials: aluminum (Al), gold (Au), tungsten (W), titanium (Ti), tantalum (Ta)...
6. Organic materials: photoresist (PR), organic polymer (PMMA/HDMS), organic thin film...
7. Ferroelectric/photoelectric materials: lithium niobate (LiNbO3)...
8. Dielectric materials: sapphire (Al2O3), quartz...

Related applications:
1. Grating etching: used for 3D display, micro-optical devices, optoelectronics, etc.;
2. Compound semiconductor etching: used for LED, laser, optical communication, etc.;
3. Patterned sapphire substrate (PSS);
4. Lithium niobate (LiNO3) etching: detectors, optoelectronics;

Application results:

Item	MD150S-ICP	MD200S-ICP	MD150CS-ICP	MD200CS-ICP	MD300C-ICP
Product size	≤6 inches	≤8 inches	≤6 inches	≤8 inches	Custom≥12inches
SRF Power source	0~1000W/2000W/3000W/5000WAdjustable,automatic matching\,13.56MHz/27MHz
BRF Power source	0~300W/0~500W/0~1000WAdjustable, automatic matching,2MHz/13.56MHz
Molecular pump	Non corrosive : 600 /1300 (L/s)/Custom		Anti-corrosion:600 /1300 (L./s)/Custom		600/1300(L/s) /Custom
Foreline pump	Mechanical pump / dry pump		Anti corrosion dry pump		Mechanical pump / dry pump
Pre pumping pump	Mechanical pump / dry pump		Mechanical pump / dry pump
Process pressure	Uncontrolled pressure/0-0.1/1/10Torr controlled pressure
Gas type	H2/CH4/O2/N2/Ar/SF6/CF4/ CHF3/C4F8/NF3/NH3/C2F6/Custom (Up to 12 channels, no corrosive & toxic gas)		H2/CH4/O2/N2/Ar/SF6/CF4/CHF3/ C4F8/NF3/NH3/C2F6/Cl2/BCl3/HBr/ Custom(Up to 12 channels)
Gas range	0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/1000sccm/Custom
LoadLock	Yes/No		Yes
Sample tem control	10°C~Roomtem/ -30°C~150°C /Custom		-30°C~200°C/Custom
Back helium cooling	Yes/No		Yes
Process cavity lining	Yes/No		Yes
Cavity wall tem control	No/Room tem-60/120°C		Room tem~60/120°C
Control System	Auto/custom
Etching material	Silicon-base: Si/SiO2/ SiNx/ SiC..... Organic materials:PR/Organic film......		Silicon-base: Si/SiO2/SiNx/SiC III-V: InP/GaAs/GaN...... IV-IV: SiC II-VI: CdTe...... Magnetic material / alloy material Metallic materials: Ni/Cr/Al/Cu/Au... Organic materials: PR/Organic film...... Silicon deep etching

Real shoots:



Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. 
Since 2014,the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. 


Frequently Asked Questions

1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.