RTP Rapid Thermal Processing Machine
Provide reliable RTP equipment for compound semiconductors,SlC,LED and MEMS
The semi-automatic
Rapid Thermal Processing Machine is a semi-automatic vertical rapid annealing system under protective gas, which heats single wafers or samples with infrared visible light. The process time is short, the temperature control accuracy is high, and it is suitable for 4-12 inch wafers
| Industry applications |
- Oxide, nitride growth
- Ohmic contact rapid alloy
- Annealing of silicide alloy
- Oxidation reflux
- Gallium arsenide process
- Other rapid heat treatment processe
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16 years of experience in equipment export!
We can provide you with a one-stop Semiconductor Front End Processes and Equipment solution!
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.
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