Semiconductor Device Fabrication Fab Wafer Fabrication Rapid Thermal Processing Rtp Machine Beol Feol

• After-sales Service: 1 Year
• Function: Abrasion Resistance
• Demoulding: Other
• Model NO.: MD
• Condition: New
• Certification: CE
• Warranty: 12 Months
• Automatic Grade: Automatic
• Installation: Vertical
• Driven Type: Electric
• Mould Life: >1,000,000 Shots
• Transport Package: Wooden Box
• Specification: 110*150*100
• Trademark: minder-hightech
• Origin: China
• HS Code: 11111

Product Description

Desktop RTP Rapid Thermal Processing Machine

Provide reliable RTP equipment for compound semiconductors,SlC,LED and MEMS

The semi-automatic Rapid Thermal Processing Machine is a semi-automatic vertical rapid annealing system under protective gas, which heats single wafers or samples with infrared visible light. The process time is short, the temperature control accuracy is high, and it is suitable for 4-12 inch wafers

Industry applications

1. Oxide, nitride growth
2. Ohmic contact rapid alloy
3. Annealing of silicide alloy
4. Oxidation reflux
5. Gallium arsenide process
6. Other rapid heat treatment processe

 

 

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We can provide you with a one-stop Semiconductor Front End Processes  and Equipment solution!