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Audited Supplier Microwave Plasma Cleaner
SPV-100MWR is a low voltage microwave plasma cleaning system for semiconductors. By applying microwave with the frequency of 2.45GHz to the window on the wall of the vacuum cavity, a large number of continuous Plasma is generated, and the chip is cleaned by entering the cavity.
| Vacuum plasma host | ||
| Equipment size | 1230X1800X1100mm (width x height x depth) | |
| Weight | 450kg | |
| Power demand | AC380V, 50/60Hz, 5-wire, 30A | |
| Plasma generator specifications | ||
| Microwave power supply | Power | 0~1250W |
| Frequency | 2.45GHz | |
| Vacuum system | ||
| Material | Aluminum alloy (customizable stainless steel chamber) | |
| Thickness | 25mm | |
| Internal dimensions of the cavity | 480mmX470mmX480mm | |
| Workspaces | 6 magazine sections | |
| ECR | Slotted Magazine provides ECR enhanced processing effect | |
| Plasma capability | ||
| Processing ability | 35um Pitch 40μm Bump 15X15mm Maximum Die size |
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