Semiconductor Material Processing Equipment Reactive Ion Etching System Rie Failure Analysis Silicon Based Material Etching

• After-sales Service: 1 Year
• Warranty: 1 Year
• Type: Rie
• Model NO.: MD150-RIE
• Certification: CE
• Etching Type: Double Spray
• Precision: High Precision
• Condition: New
• Transport Package: Wooden Case
• Trademark: minder-hightech
• Origin: China
• Production Capacity: 1000

Product Description

Reactive ion etching system (RIE)

Reactive ion etching (RIE) can be used to prepare micro-nano structures and is one of the semiconductor manufacturing process technologies. During the RIE etching process, various active particles in the plasma form volatile products with the surface of the material. These products are taken away from the surface of the material, and finally anisotropic microstructure etching of the surface of the material is achieved. The reactive ion etcher (RIE) series products are based on flat-plate capacitive coupled plasma technology and are suitable for patterned etching of silicon materials such as single crystal silicon, polycrystalline silicon, silicon nitride (SiNy), silicon oxide (SiO), quartz (Quartz) and silicon carbide (SiC); can be used for patterning and material de-layering etching of organic materials such as photoresist (PR), PMMAHDMS and other materials; can be used for physical etching of metal materials such as nickel (Ni), chromium (Cr) and ceramic materials; can be used for room temperature indium phosphide (InP) material etching. For some etching with higher process requirements, our ICP RIE etching can also be used.


Main Configuration:
1. Support sample size: 4, 8, 12 inches, compatible with various small size samples, support customization
2. RF plasma power range: 300/500/1000 W optional;
3. Molecular pump: 620/1300 //s optional, optional anti-corrosion pump set;
4. Fore pump: mechanical oil pump/dry pump optional;
5. Pressure control: 0 ~1 Torr optional; non-pressure control mode configuration can also be selected,
6. Process gas: up to 9 process gases can be equipped at the same time; temperature: 10 degrees ~ room temperature/-30 degrees ~ room temperature/customizable temperature range,
9. Back helium cooling can be configured according to the application;
10. Removable anti-pollution lining;
11. Load-lock optional;
12. Fully automatic one-button control system;

RIE Applicable Materials:
1. Silicon-based materials: silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC)
2. III-V materials: indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN)
3. II-VI materials: cadmium telluride (CdTe)
4. Magnetic materials/alloy materials
5. Metal materials: aluminum (AI), gold (Au), tungsten (W), titanium (Ti), tantalum (Ta)
6. Organic materials: photoresist (PR), organic polymer (PMMA/HDMS), organic thin film

RIE Related Applications:
1. Etching of silicon-based materials, nanoimprint patterns, array patterns and lens patterns;
2. Room temperature etching of indium phosphide (InP), patterned etching of InP-based devices in optical communications, including waveguide structures, resonant cavity structures, and ridge structures;
3. Etching of SiC materials, suitable for microwave devices, power devices, etc.;
4. Physical sputtering etching is applied to certain metals, such as nickel (Ni), chromium (Cr), ceramics and other materials that are difficult to etch chemically, and patterned etching of materials is achieved through physical bombardment;
5. Etching of organic materials is applied to etching, cleaning and removal of organic materials such as photoresist (Photo Resist), PMMA, HDMS, Polymer;
6. De-layering etching for chip failure analysis (Failure Analysis-FA);
7. Etching of two-dimensional materials: W, Mo two-dimensional materials, graphene;

Application Results:

Project configuration and machine structure diagram

Item	MD150-RIE	MD200-RIE	MD200C-RIE
Product size	≤6 inches	≤8 inches	≤8 inches
RF power source	0-300W/500W/1000W Adjustable,automatic matching
Molecular pump	-/620(L/s)/1300(L/s)/Custom		Antiseptic620(L/s)/1300(L/s)/Custom
Foreline pump	Mechanical pump/dry pump		Dry pump
Process pressure	Uncontrolled pressure/0-1Torr controlled pressure
Gas type	H/CH4/O2/N2/Ar/SF6/CF4/ CHF3/C4F8/NF3/Custom (Up to 9 channels, no corrosive & toxic gas)		H2/CH4/O2/N2/Ar/F6/CF4/ CHF3/C4F8/NF3/Cl2/BCl3/HBr(Up to 9 channels)
Gas range	0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/custom
LoadLock	Yes/No		Yes
Sample tem control	10°C~Room tem/-30°C~100°C/Custom		-30°C~100°C /Custom
Back helium cooling	Yes/No		Yes
Process cavity lining	Yes/No		Yes
Cavity wall tem control	No/Roomtem~60/120°C		Room tem-60/120°C
Control System	Auto/custom
Etching material	Silicon-based:Si/SiO2/SiNx··· IV-IV: SiC Magnetic materials/alloy materials Metallic material: Ni/Cr/Al/Au..... Organic material: PR/PMMA/HDMS/Organic film......		Silicon-based: Si/SiO2/SiNx...... III-V(3): InP/GaAs/GaN...... IV-IV: SiC II-VI (3): CdTe...... Magnetic materials/alloy materials Metallic material: Ni/Cr/A1/Au...... Organic material: PR/PMMA/HDMS /organic film...

Factory and Laboratory Shooting:

Package:

Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. 
Since 2014,the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. 

FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.