After-sales Service: | Provide |
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Function: | Wafer Laser Dicing |
Demoulding: | Automatic |
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Processing size | 12 inches, 8 inches, 6 inches, 4 inches |
Processing method | Cut/back cut |
Processing material | Sa pphire,Si,GaN and other brittle materials |
Wafer thickness | 100-1000um |
Maximum processing speed | 1000/s |
Positioning accuracy | 1um |
Repeat positioning accuracy | 1um |
Edge collapse | < 5um |
Weight | 2800kg |