After-sales Service: | Installation, Training |
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Warranty: | One Year Warranty |
Type: | Electrical Etching Machine |
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Inductively coupled plasma etching machine-ICP
Item | MD150S-ICP | MD200S-ICP | MD150CS-ICP | MD200CS-ICP | MD300C-ICP |
Product size | ≤6 inches | ≤8 inches | ≤6 inches | ≤8 inches | Custom≥12inches |
SRF Power source | 0~1000W/2000W/3000W/5000WAdjustable,automatic matching\,13.56MHz/27MHz | ||||
BRF Power source | 0~300W/0~500W/0~1000WAdjustable, automatic matching,2MHz/13.56MHz | ||||
Molecular pump | Non corrosive : 600 /1300 (L/s)/Custom | Anti-corrosion:600 /1300 (L./s)/Custom | 600/1300(L/s) /Custom | ||
Foreline pump | Mechanical pump / dry pump | Anti corrosion dry pump | Mechanical pump / dry pump | ||
Pre pumping pump | Mechanical pump / dry pump | Mechanical pump / dry pump | |||
Process pressure | Uncontrolled pressure/0-0.1/1/10Torr controlled pressure | ||||
Gas type | H2/CH4/O2/N2/Ar/SF6/CF4/ CHF3/C4F8/NF3/NH3/C2F6/Custom (Up to 12 channels, no corrosive & toxic gas) |
H2/CH4/O2/N2/Ar/SF6/CF4/CHF3/ C4F8/NF3/NH3/C2F6/Cl2/BCl3/HBr/ Custom(Up to 12 channels) |
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Gas range | 0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/1000sccm/Custom | ||||
LoadLock | Yes/No | Yes | |||
Sample tem control | 10°C~Roomtem/ -30°C~150°C /Custom | -30°C~200°C/Custom | |||
Back helium cooling | Yes/No | Yes | |||
Process cavity lining | Yes/No | Yes | |||
Cavity wall tem control | No/Room tem-60/120°C | Room tem~60/120°C | |||
Control System | Auto/custom | ||||
Etching material | Silicon-base: Si/SiO2/ SiNx/ SiC..... Organic materials:PR/Organic film...... |
Silicon-base: Si/SiO2/SiNx/SiC III-V: InP/GaAs/GaN...... IV-IV: SiC II-VI: CdTe...... Magnetic material / alloy material Metallic materials: Ni/Cr/Al/Cu/Au... Organic materials: PR/Organic film...... Silicon deep etching |