Exposure Machine, Mask Aligner, Lithography Machine manufacturer / supplier in China, offering Manual Mask Aligner MD-Bg-401A, High-Frequency Ultrasonic Dispersion Machine Suitable for Laboratories and Factories, Ultrasonic Dispersion Equipment Can Be Connected in Series to Process Materials in Batches and so on.
|Min. Order / Reference FOB Price||1 Piece||US $26,500-75,000/ Piece|
|Proximity Exposure:||Vacuum Contact|
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MD-BG-401A Mask Aligner is used in aligning and exposure process of small or middle scale IC, SAW, and other semiconductor device.
Alignment:Alignment provides high precision and less excursion. Three-point paralleling with less force is achieved by wedge error compensation, and the use life of mask is prolonged.
Exposure system:Pole fly's lens and ellipsoidal reflector with high light gathering power
Split view field microscope :Large scan and observing range in X and Y direction, shift between single field and double field, higher alignment efficiency and overprint precision, compatibility of image display function with CCD
Operation is convenient by PLC and LCD display adopted in electric control system, and high reliability and stability could be obtained. Stability and reliability of the equipment are improved by use of key parts from import or professional manufacturer, pneumatic elements from SMC, and personal service is provided for different user.
X- axis:±5mm Y- axis:±5mm
Z- axis:3mm θ:±12°
Size of mask: Max5″×5″
Size of wafer: Maxφ4″
Gap between wafer and mask:0-0.05mm
Exposuring Resolution:1.0um (Vacuum contact)
Exposure system and wavelength:
250w High pressure mercury lamp, UV365
Exposure mode: Vacuum contact, hard contact
Exposure time:0-999.9s continuous setting
Max Exposure area: φ108mm
Non-uniformity of Exposure: ±3%
Split view field microscope
Total magnification: 100×(50×optional)
Range of scan: 50mm×50mm
Range of focus: 8mm
Separation between objectives: 28-90mm
Light: Red or yellow
Air pressure: 0.5~0.7MPa
N2 pressure: 0.2~0.4MPa
Dimensions & Weight:
Overall Dimensions: 830mm×690mm×1270mm
Application has been in
Small or middle IC,SAW,other
Photoelectric/power device,sensors,hybrid circuits,MEMS etc.
GPP diode,power device,others.
Guangzhou minder-hightech co., ltd minder-hightech.en.made-in-china.com
No.1 Xingya 3 Road, panyu district, guangzhou, China
Shunyu Hu 0086-15813334038