Semiconductor Automatic Dual Chamber Rtp Rapid Thermal Processing Machine

• After-sales Service: Online
• Function: Abrasion Resistance
• Demoulding: Other
• Condition: New
• Certification: CE
• Warranty: 12 Months
• Model NO.: MD
• Automatic Grade: Automatic
• Installation: Vertical
• Driven Type: Electric
• Mould Life: >1,000,000 Shots
• Transport Package: Wooden Box
• Specification: 150*160*200
• Trademark: MINDER-HIGHTECH
• Origin: China
• HS Code: 111
• Production Capacity: 1

Product Description

RTP SYSTEM
Rapid Thermal Processing
Provide reliable RTP equipment for compound semiconductors,SlC,LED and MEMS

Industry applications

1. Oxide, nitride growth
2. Ohmic contact rapid alloy
3. Annealing of silicide alloy
4. Oxidation reflux
5. Gallium arsenide process
6. Other rapid heat treatment processes

Fully automatic dual chamber RTP

Feature:

1. Compatible with 6-8inch WAFER
2. The maximum temperature can reach 1250°c
3. Stable temperature reproducibility
4. Fully automatic dual chamber design to increase production capacity
5. Uniformity of ultra-high temperature field
6. Meet the demand for SlC mass production process

16 years of experience in equipment export!
We can provide you with a one-stop Semiconductor Front End Processes  and Equipment solution!