After-sales Service: | 1 Year |
---|---|
Condition: | New |
Speed: | High Speed |
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Stage size | 8, 12[inch] | MAX 300x300[mm] |
Ball size | Ф50[um]~ Ф300[μm] | |
Min. ball pitch | 90[um](Ф50[um] ball) | |
Alignment accuracy | +15[um] | |
Dimensions | 3,065W x 1,700D x 1,650H[mm] | |
Weight | Approx. 2,900[kg] | |
Loader/ Unloader | Open cassette, FOUP | Customizable |