Wafer Scrubber
Fully automatic single-chip wafer cleaning machine
Machine features:
Single cavity, two cavity, and four cavity
Strong process capability, capable of supporting applications such as Wafer Start and process cleaning
Good consistency of equipment inter chip technology
Application Fields:
Surface particle removal of 4-8 inch silicon-based and compound based wafers
Technical parameters:
4-inch, 6-inch, 8-inch brush cavity
Spinner speed up to 4000RPM
Dual Arm brush chamber, available in Brush, AS, JET, Megasonics cleaning methods
Can support liquid cleaning function
A. LoadPort unit, loading unit
LoadPort is the loading unit of this device Capable of Wafer Mapping
Equipped with Wafer slide detection
B.Transfer Robot unit
Dual Blade Robot, optional with vacuum or tray type Blades.
C. Alignment and flipping unit
Can align and locate flat edges
Wafer can be flipped to scrub the crystal back
D/E. Brushing unit
Brushing Arm Quantity * 2
Wafer handle: Chuck clamp or suction type
Brush, AS, JET, Megasonics cleaning modes, supporting pharmaceutical cleaning
1. Supports Wafer input and output simultaneously, as well asA input and B output modes
2. Can support brushing the front of chamber A andthe back of chamber B
3. Can support dual chamber parallel cleaning
Brush unit description:
Supports Wafer input and output simultaneously, as well as A input and B output modes
Can support brushing the front of chamber A and the back of chamber B
Can support dual chamber parallel cleaning
Alignment and flipping unit:
Wafer can be used for residential and leveling purposes Wafer can be flipped
Equipment size: 160x150x220 (mm)
Loading and unloading methods: same in and same out&A in and B out
Number of brushing units: 2
Brushing modes: Brush, AS, JET, Megasonics cleaning methods, supporting pharmaceutical cleaning
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment.
The company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
Frequently Asked Questions
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.
Machine feature
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