Semiconductor Optical Inspection Ellipsometry Spectroscopic Ellipsometer

• After-sales Service: 1 Year
• Warranty: 1 Year
• Type: 2D Video Measuring System
• Model NO.: MD
• Operate Method: CNC
• Transport Package: Wooden Case
• Trademark: MH
• Origin: China
• Production Capacity: 1000

Product Description

Spectroscopic Ellipsometer
Spectral ellipsometer can complete fast and multi-point automatic testing, and can test sample uniformity with one click. The product polarizer, analyzer, and compensator are both equipped with absolute coding high-precision position locking devices with bandgap compensation function, which increases system accuracy and stability. Adopting a dual fiber architecture to enhance light collection efficiency, sufficient spectra can be collected from etched acid polishing surfaces or conventional pyramid fronts for testing and analysis. It also has basic functions such as autofocus, light intensity selection, and phase compensation.
Designed for high-precision and high-efficiency analysis of optical properties of materials. It can automatically, quickly and accurately measure the refractive index, extinction coefficient and film thickness of materials. It is suitable for thin film and material characterization needs in scientific research, semiconductors, photovoltaics, optical coatings, display panels and other fields.

Measurement Object:
Optical coating: Si02, Si3N4, SnO2, Nb205,Ti02, Ta205, A2O3, MgF2,Pi.
Display: OLED(AIG3, PCBM, NPB, NPD...), electrodes(ITO, PEDOT, MgO, Ag, Al, Mg...) ...
Photovoltaic: Si, Poly-Si, SiNx, CdS, CIGS, CdTe, PFN-Br, ABX3, PEDOT:PSS, PTB7-Th:PC71BM.
Semiconductor: Photoresist, ZnO, SiON, SiC, SiGe, GaN, AIN, InP, GaAs, AlxGa(1-x)N
Others: OCD, 2-D materials, Van der Waals heterojunction and device...



Measurement principle:
The principle of Ellipsometry measurement is based on the change of polarization state of optical reflects before and after the surface of the medium, to obtain the optical property and structure information.

The electric field of the incident beam is decomposed in two vertical directions, p light parallel to the vibration of the light wave, s light perpendicular to the vibration of the light wave. The amplitudes and phases of p and S light will change when the beam is reflected from the surface of the medium.

The correlation between physical characteristics of the medium and the change of state of polarization.

Product Function:
Refractive index measurement: Accurately measure the refractive index of materials at different wavelengths, providing key data for optical design and material research.
Extinction coefficient measurement: Analyze the light absorption characteristics of materials to help optimize the performance of optoelectronic devices.
Film thickness measurement: Supports thickness detection of nanometer to micron-level films with high resolution and good repeatability.
Fast automatic testing: With multi-point automatic scanning function, the measurement speed reaches 1 second/point, which greatly improves the efficiency of batch testing.

Instrument working environment:
Power:220VAC+10%
Room temperature:environment temperature(10-30)ºC
Relative humidity:(20-80)%RH

Spectrometer:
Detection unit: 2048 pixel fast back-illuminated CCD detector
Detailed parameters :
A. spectrum range better than 350nm-1000nm
B. stray light<0.02%@400nm
C. signal-to-noise ratio 4800
D. dynamic range 50000:1
E. holographic light path
F. digital resolution 16-bit
J. reading speed >400kHz
K. data transmission speed 600MB/s
H. minimum integration time/adjustment step 6 us /1us
I. external trigger delay 95ns+/-20ns
J. computer interface USB4.1C/2.0
K. operating system Win 7/in 8/Win 10
verage QE in UV region back-illuminated CCD, average QE ≥75%Cooling system micro TE cooling, temperature after cooling is 30'c lower than environment temperature.
Integration method software controlled automatic integration time setting, can achieve best

Light source system:
Light source halogen lamp with quartz bulb, wavelength range 350nm-2000nm, no decay lifetime longer than 50000 hours.
Power independent power supply for halogen lamp voltage 4.9vd

Stage with auto focusing function:
Move sample to the best measurement position with auto focusing functionStroke:100mm
Accuracy: 0.0005mm
Location limitation with both positive and negative limit and zero-position sensor; start position,ending position, step length of auto focus function can be set in the software using Gaussian regression method; set specified integration time and collect intensity of Focus method

Basic parameter selection table:

Spectral range	350-1000nm	C			Visible
	210-1000nm	UC			UV-Visible
	210-1700nm	UN			UV-Vis-NIR
Optical compensator	RC				Single compensator
	RC2		C2		Dual compensator
Spectral range	X-Y			M	Large stroke up to 230mm
	X-R			R	Large diameter up to 300mm

Optical system:

Incident angle	65°
Beam deviation	< 0.3°
Measurement parameters	Psi&Del,TanPsi&CosDel,Alpha&Beta
Polarizers	Glan-Thompson
Material	a-BBO
Compensator	quarter-wave phase delay, hyper achromatic
Intensity selection	Linear optical density selection element. Ensures good signal-to-noise ratio in measurement process, improves data accuracy, avoids light intensity to saturate or too weak to reduce the signal-to-noise ratio and accuracy
Optical design	dual fiber convey the light from lamp to spectrometer through polarization elements;stable light path, convenient to change lamps
Fiber	anti-UV passivation; NA=0.22;clear aperture 600um
Micro light spot	diameter ≤200um, to distinguish between the useful light reflected from front surface and the useless light reflected from the bottom surface, easy to disassemble
Slit	1 50um, for distinguishing between the useful light reflected from front surface and the useless light reflected from the bottom surface

Machine structure:

Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. 
Since 2014,the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. 


FAQ
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.