| After-sales Service: | Installation, Training |
|---|---|
| Warranty: | 1 Year |
| Type: | Coating Production Line |
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Product Introduction
Used for preparing single/multi-layer functional nanofilms including various hard, metallic, semiconducting and dielectric films for universities and science institutions.
Structure
Sputtering vacuum chamber, magnetron sputtering target, water-cooling substrate heating turntable, sample injection chamber, sample chamber, annealer, backwash target, magnet sample send mechanism, gas circuit, pumping system, vacuum measurement system, electrical control system and mounting base
| Structure |
| Sputtering vacuum chamber, magnetron sputtering target, water-cooling substrate heating turntable, sample injection chamber, sample chamber, annealer, backwash target, magnet sample send mechanism, gas circuit, pumping system, vacuum measurement system, electrical control system and mounting base |
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