| After-sales Service: | 1 Year |
|---|---|
| Warranty: | 1 Year |
| Type: | Electrical Etching Machine |
|
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| PLASMA source | RF | RF | |
| power |
ICP | 1000w | 1000w |
| BIAS |
600w(option) | 600w(option) | |
| Applicable scope | 4~8 inch | 4~8 inch | |
| Single processing slice count | 1 | 2 | |
| Appearance dimensions | 1080x1840x1800mm | 1340x2050x1800mm | |
| System control | Industrial control system | Industrial control system | |
| Automation level | automatic | automatic | |
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