After-sales Service: | 1 Year |
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Function: | Abrasion Resistance |
Demoulding: | Automatic |
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Power Systems | Custom RF power supply:13.56MHz 0-600W(Adjustable) |
Fully automatic vacuum capacitor matcher | |
Vacuum system | Custom two-stage rotary vane pump(Oil pump):40m3/h |
Vacuum gauge: Japan Inficon Pirani vacuum gauge | |
Vacuum line: all stainless steel line high strength vacuum bellows | |
Cavity system (customizable) |
Aluminum alloy material; grade welding 25mm thickness |
Cavity internal dimensions:375*375*425mm(W*H*D) | |
Electrode plate layout:Horizontal arrangement, extractable | |
Work tray | |
Space layer number:6 layers | |
Gas system | Pneumatic valve:Japan SMC |
Flow meter:China SevenStar:0-300SCCM | |
Two process gases:Argon, oxygen (Argon, oxygen, nitrogen, hydrogen, four nitrogen fluoride are optional.) |
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Control system | PLC:German SIEMENS S series |
Seven inch touchscreen: WEINVIEW | |
Electrical parts | |
Other parameters | Dimensions:885*900*1576mm(W*H*D) |
Weight:350kg | |
Color:Silver |