Srd Wafer Dryer Spm Acid Cleaning, Organic Cleaning, Developing, Degumming Process Wafer Drying

• After-sales Service: 1 Year
• Warranty: 1 Year
• Movement Way: Combined
• Atomization: Rotary Atomization
• Flow: Cross Flow
• Heating Mode: Dielectric
• Model NO.: MDSD
• Material Status: Solution
• Drying Medium: Inactive Gas
• Operation Pressure: Vacuum
• Operational Method: Continuous
• Trademark: minder-hightech
• Origin: Guangzhou
• HS Code: 8015809090
• Production Capacity: 200PCS/Yearpcs/Year

Product Description

MDSD wafer dryer

MDSD wafer dryer

 Features
* Reasonable structure design and mature technology
*Simple operation, convenient maintenance, stable and reliable operation of the whole machine
* Low vibration, good reliability and large output
technical parameter
*Wafer size: applicable to 2-12-inch production line
*Fragment rate: 1/10000
application area
SPM acid cleaning, organic cleaning, development, degumming, ITO etching, BOE etching, uniform glue and other process wafer drying
Equipment function
The equipment is divided into 2 stations, 4 stations and 6 stations, which can clean 2-12-inch silicon wafers, potassium nitride, gallium arsenide, sapphire, semiconductor, LED, solar energy and other wet processes, including cleaning, drying, nitrogen drying and working chamber drying.
process parameters

process parameters	time	speed
Flushing (Type B)	0-999s	0-800r/min
Purging (type B)	0-999s	0-800r/min
Drying I (type B)	0-999s	0-800r/min
Drying II (type B)	0-999s	0-800r/min

Factory conditions

Voltage	Single-cavity power	Nitrogen pressure	Nitrogen flow	Pure water pressure	Pure water flow	Nitrogen interface	Pure water interface	Drainage caliber	outlet diameter
AC380V/50Hz	5KW	0.25-0.4MPa	180-250L/min	0.2-0.3MPa	7-12L/L/min	3/8	3/8	DN32	DN110

Features
* Adopt PLC intelligent control to make all operation reliable and program intelligent.
* Adopt frequency conversion motor belt drive, low maintenance.
* Rotary shaft nitrogen seal, labyrinth design, to ensure that the chamber is isolated from the external environment during equipment operation.
* PTFE air control valve, clean pipe fittings.
* The main components are made of high-quality stainless steel SUS304. The internal frame is made of national standard stainless steel square steel, which is corrosion resistant and corrosion resistant. The appearance design is novel, humanized and easy to operate.
* The rotating mechanism is verified by precise dynamic balance, and the main frame is of load-bearing structure, which ensures the balance and stability of the system during operation, reduces the generation of vibration sources and greatly reduces the fragmentation rate.
* The top of the cover adopts imported silica gel heating auxiliary system, which is dry without dripping after drying.
* Electric heating system is adopted, with fast temperature rise, easy control and stable temperature.