Microwave Plasma Cleaning Machine
For semiconductor chip bonding pre-processing, plastic packaging pre-processing, photoresist removal, metal bonding and pre-processing.
Product introduction:
This is a low voltage microwave plasma cleaning system for semiconductors. By applying microwave with the frequency of 2.45GHz to the window on the wall of the vacuum cavity, a large number of continuous Plasma is generated, and the chip is cleaned by entering the cavity.
Advantages:
1. Plasma is uncharged and will not cause damage to circuits
2. Keep the temperature low during the treatment process
3. Fast response speed and short reaction time
4. No electrodes, no pollution sources, long life
5. Able to maintain plasma under high pressure
6. Microwave junctions and magnetic circuits are compatible
7. Low self-bias voltage requirements
8. The high voltage source and generator are isolated from each other for safety
Application areas:
Dual power supply technology Microwave+Bias RF:
Microwave achieves excellent stripping rate and uniformity (photoresist stripping) characteristics, radio frequency bias provides directional kinetic energy for plasma movement, and dual power supply technology improves the efficiency and effect of semiconductor stripping and etching.
Technical parameters:
| Vacuum plasma host |
| Equipment size |
1230X1800X1100mm (width x height x depth) |
| Weight |
450kg |
| Power demand |
AC380V, 50/60Hz, 5-wire, 30A |
| Plasma generator specifications |
| Microwave power supply |
Power |
0~1250W |
| Frequency |
2.45GHz |
| Vacuum system |
| Material |
Aluminum alloy (customizable stainless steel chamber) |
| Thickness |
25mm |
| Internal dimensions of the cavity |
480mmX470mmX480mm |
| Workspaces |
6 magazine sections |
| ECR |
Slotted Magazine provides ECR enhanced processing effect |
| Plasma capability |
| Processing ability |
35um Pitch
40μm Bump
15X15mm Maximum Die size |
Equipment details:
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment.
The company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
Frequently Asked Questions
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.
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