Semiconductor Manufacture Optical Measurement Testing Autonomous Optical Wafer 2D&3D Inspection Aoi System Machine

• After-sales Service: 1 Year
• Function: Wafer Optical Inspect
• Demoulding: Automatic
• Model NO.: MH
• Condition: New
• Certification: CE
• Warranty: 12 Months
• Automatic Grade: Automatic
• Installation: Vertical
• Driven Type: Electric
• Mould Life: >1,000,000 Shots
• Transport Package: Wooden Case
• Trademark: MH
• Origin: China
• Production Capacity: 1000

Product Description

Wafer 2D&3D Inspection System

Project	Content
Product Type	6",8",12" wafer, 2.5D/3D packaging
2D Inspection Items	Foreign objects, residual glue, particles, scratches, cracks, contamination, CP deviation, excessive needle marks, etc.
2D Metrology	Bump diameter, needle mark coordinates, RDL and TSV metrology, etc.
3D Inspection Project	Bump height, Bump coplanality
Cassette &Transmission Method	8"SMIF , 12" FOUP or combination
Lens and Resolution	2x(2.75um)13.5x(1.57um)5x(1.1um)17.5x(0.73um)110x(0.55um)
Precision	0.55um/pixel
Optional and Customized	Double sided OCR,3D module, supported by E84

Introduction to Main Modules
EFEM:
1. Manually load 12-inch FOUPs or 8-inch cassettes onto the loading position
2. Dual-arm design to reduce waiting time for changing wafers.
3. Compatible with 8-inch and 12-inch product alignment, and can also be customized for 6-inch wafers.
STAGE:
1. Flying capture for image acquisition and inspection.
2. Able to detect 3D information such as Bump height and coplanarity.
3. Achieves sub-micron precision.
4. Calculation results are available immediately after scanning


Software Introduction
1.Supports multi-level permissions and permission operation log functions
2.The equipment menu bar covers a wide range of functions
3.Automatically generates mapping and production reports
4.Displays task status in real-time.
5.Combines traditional algorithms with Al for fast and accurate defect
identification.


Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. 
The company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. 

Frequently Asked Questions

1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.

2. About Sample:
We can provide sample production services for you, but you may provide some fees.

3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.

4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.

5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.

6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.