Vacuum Plasma Surface Treatment Machine Plasma Cleaner Cleaning Equipment for PCB FPC Semiconductor

• Function: Abrasion Resistance
• Certification: CE
• Warranty: 12 Months
• Automatic Grade: Semiautomatic
• Installation: Vertical
• Driven Type: Electric
• Mould Life: >1,000,000 Shots
• Transport Package: Minder-Hightech
• Trademark: minder-hightech
• Origin: China
• Production Capacity: 100

Product Description

Product Description

Vacuum plasma cleaner

Product Parameters

Vacuum plasma host unit (60)
Equipment size	L 950×W 900×H 1650mm
weight	350kg
Demand power supply	AC380V, 50 / 60Hz, 5 line, 16A (total open type above C)
Plasma generator specification
power	radio frequency	intermediate frequency
	0~600W	0-1000W
supply frequency	13.56MHz	40 K Hz
Vacuum system
vacuum pump	Double-stage rotary pump (oil pump): 40m3/h
vacuum pipeline	All stainless steel line, as well as high strength vacuum bellows
material quality	Aluminum alloy (customizable stainless steel cavity)
thickness	25mm
tightness	Military-grade welding seal
Internal dimensions of the cavity	375*375*430mm(Width* high * depth)
Electric plate effective size	247*281mm (wide* depth)
Available space spacing	22mm
Electroplate arrangement	Horizontal layout, can be active extraction
trays	Standard set, material optional (aluminum, steel wire mesh)
work space	6 layer
process gas
Flow range	0~300SCCM
Process gas gas route	Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon
navar
SC	PLC
interactive mode	7-Inch touch screen

 

Vacuum plasma host unit (100)
Equipment size	L 1000×W 900×H 1750mm
weight	500kg
Demand power supply	AC380V, 50 / 60Hz, 5 line, 16A (total open type above C)
Plasma generator specification
power	radio frequency	intermediate frequency
	0~600W	0-1000W
supply frequency	13.56MHz	40 K Hz
Vacuum system
vacuum pump	Overflight rotary pump (oil pump): 60 m3/h
vacuum pipeline	All stainless steel line, as well as high strength vacuum bellows
material quality	alufer
thickness	25mm
tightness	Military-grade welding seal
Internal dimensions of the cavity	450*450*500mm(Width* high * depth)
Electric plate effective size	322*351mm (wide *depth)
Available space spacing	20mm
Electroplate arrangement	Horizontal electrode plate
trays	Standard set, material optional (aluminum, steel wire mesh)
work space	8 layer
process gas
Flow range	0~300SCCM
Process gas gas route	Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon
navar
SC	PLC
interactive mode	7-Inch touch screen

 

Vacuum plasma host unit (150)
Equipment size	L 1100×W 940×H 1755mm
weight	600kg
Demand power supply	AC380V, 50 / 60Hz, 5 line, 16A (total open type above C)
Plasma generator specification
power	radio frequency	intermediate frequency
	0~1000W	0-2000W
supply frequency	13.56MHz	40 K Hz
Vacuum system
vacuum pump	Leap monopole pump VSV 65 + Bowse Lots Pump BSJ 70
vacuum pipeline	All stainless steel line, as well as high strength vacuum bellows
material quality	alufer
thickness	25mm
tightness	Military-grade welding seal
Internal dimensions of the cavity	500*500*600mm (Width* high * depth)
Electric plate effective size	372*451mm (wide *depth)
Available space spacing	24mm
Electroplate arrangement	Horizontal electrode plate
trays	Standard set, material optional (aluminum, steel wire mesh)
work space	8 layer
process gas
Flow range	0~300SCCM
Process gas gas route	Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon
Control System
SC	PC control
interactive mode	Windows Interface

 

Vacuum plasma host unit (200)
Equipment size	1050×1700×1050mm(width, height and depth)
weight	800kg
Demand power supply	AC380V,50/60Hz,5wires, 30A
Plasma generator specification
mains power	radio frequency	IF
	0~1000W	0-2000W
supply frequency	13.56MHz	40 K Hz
Vacuum system
vacuum pump	Feiyue unipolar pump VSV100+Both Roots pump BSJ70
vacuum line	All stainless steel line, as well as high strength vacuum bellows
material	Aluminum alloy
thickness	25mm
tightness	Military grade welded seal
Cavity Internal Dimensions	600*600*600mm (Width* high * depth)
Effective size of electrode plate	472*451mm (wide *depth)
space available	35mm
Electrode plate layout	Horizontal electrode plate
work tray	One set is standard, and the material is optional (aluminum, steel mesh)
Workspace	8 floors
process gas
Flow range	0~300SCCM
Process gas circuit	Equipped with O2, Ar, N2 three-way gas
Control System
system control	PC control
interactive mode	Windows interface

 

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