| After-sales Service: | 1 Year |
|---|---|
| Warranty: | 1 Year |
| Light Source Environment: | Yellow Light |
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This "MCXJ-MLS8 Technical Specification" stipulates the specifications, configuration, technical requirements, acceptance methods and standards, installation and training plans, equipment basic facility requirements, parts and consumables, after-sales service, etc. of the products, systems and services provided by Macex, as the customer and MACEX on the MCXJ-MLS8 laser direct imaging equipment customer site test and acceptance standards, the test will be jointly carried out by the customer and representatives of MACEX Company at the customer site, and check the test results together.
| No. | Environment | Require |
| 1 | Light source environment | Yellow light |
| 2 | Temperature | 22ºC±2ºC |
| 3 | Humidity | 50%±10% |
| 4 | Cleanliness | 1000 |
| 5 | CDA | 0.6±0.1Mpa,200LPM, dry, clean air |
| 6 | Power supply | 220~240V,50/60Hz,2.5KW;The ground wire must be grounded, |
| 7 | Cooling water | Temp.:10ºC~ 20ºC Pressure:0.3MPa ~ 0.5MPa Flow rate:20L/min Pressure difference:0.3MPa Take over caliber:Rc3/8 |
| 8 | Venue | level:±3mm/3000mm shake:VC-B Bearing:750 |
| 10 | Internet | One network port |
| 11 | Machine size | 1300*1100*2100mm |
| 12 | Device weight | 1500kg |
| No. | Project | Spec. | Remark |
| 1 | Resolution | 0.6um | AZ703,AZ1350 |
| 2 | CDU | ±10%@1um | |
| 3 | Substrate thickness | 0.2mm~4mm | |
| 4 | Date grid accuracy | 60nm | |
| 5 | Overlay | ±500nm | 130mmx130mm |
| 6 | Stitching accuracy | ±200nm | AZ703 |
| 7 | MAX exposure size | 190X190mm | |
| 8 | Throughput | ≥300mm2/min | ≤50mj/cm2; |
| 9 | light source | LD 375nm | |
| 10 | light power | 6W | |
| 11 | Energy uniformity | ≥95% | |
| 12 | light life | 10000hr |
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