Semiconductor Chip Manufacturing Equipment Silicon Carbide Etching Rie Plasma Glue Remover

• After-sales Service: 1 Year
• Certification: CE
• Warranty: 12 Months
• Automatic Grade: Semiautomatic
• Installation: Vertical
• Driven Type: Electric
• Model NO.: 0
• Mould Life: >1,000,000 Shots
• Weight: 800
• Plasma Source: RF
• Applicable Scope: 4~8inch
• Single Processing Slice Count: 1
• Transport Package: Minder-Hightech
• Specification: 850mmx900mmx1850mm
• Trademark: minder-hightech
• Origin: China

Product Description

 

Product Description

RIE PLASMA Glue Remover
Silicon carbide etching
Surface cleaning after etching
DESCUM
Hard mask layer, dry removal
Silicon oxide or silicon nitride etching
Removal of optical resistance between media
Surface residue removal

Product Parameters

 

PLASMA source		RF
power	ICP	1000w
	BIAS	600w(option)
Applicable scope		4~8inch
Single processing slice count		1
Appearance dimensions		850mmx900mmx1850mm
System control		PLC
Automation level		Manual

 

Company Profile

We have 16 years of experience in equipment sales ,and can provide you with a one-stop IC Package Line Equipment solution!!
RIE PLASMA Glue Remover
Silicon carbide etching
Surface cleaning after etching
DESCUM
Hard mask layer, dry removal
Silicon oxide or silicon nitride etching
Removal of optical resistance between media
Surface residue removal