| After-sales Service: | 1 Year |
|---|---|
| Certification: | CE |
| Warranty: | 12 Months |
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RIE PLASMA Glue Remover
Silicon carbide etching
Surface cleaning after etching
DESCUM
Hard mask layer, dry removal
Silicon oxide or silicon nitride etching
Removal of optical resistance between media
Surface residue removal
| PLASMA source | RF | |
| power | ICP | 1000w |
| BIAS | 600w(option) | |
| Applicable scope | 4~8inch | |
| Single processing slice count | 1 | |
| Appearance dimensions | 850mmx900mmx1850mm | |
| System control | PLC | |
| Automation level | Manual | |
We have 16 years of experience in equipment sales ,and can provide you with a one-stop IC Package Line Equipment solution!!
RIE PLASMA Glue Remover
Silicon carbide etching
Surface cleaning after etching
DESCUM
Hard mask layer, dry removal
Silicon oxide or silicon nitride etching
Removal of optical resistance between media
Surface residue removal
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