After-sales Service: | 1 Year |
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Certification: | CE |
Warranty: | 12 Months |
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structure size | |
Basic frame | 820*820*1000mm |
cavity volume | 10L |
Maximum height of base | 110mm |
Observation window | include |
Weight | 220KG |
Vacuum system | |
Vacuum pump | Vacuum pump with oil pollution filtering device |
Vacuum level | Up to 5Pa |
Vacuum configuration | 1. Vacuum pump 2. Electric valve |
Pumping speed control | The pumping speed of the vacuum pump can be set by the host computer software |
Pneumatic system | |
Process gas | N2, N2 / H2 (95% / 5%), HCOOH |
First gas path | Nitrogen/nitrogen-hydrogen mixture (95%/5%) |
Second gas path | HCOOH |
Heating and cooling system | |
Heating method | Radiant heating, contact conduction, heating rate 150ºC/min |
Cooling method | Contact cooling, the maximum cooling rate is 120ºC/min |
Hot plate material | copper alloy, thermal conductivity: ≥200W/m·ºC |
Heating size | 240*210mm |
Heating device | Heating device: the vacuum heating tube is used; the temperature is collected by the Siemens PLC module, and the PID control is controlled by the host computer Advantech. |
Temperature range | Max 400ºC |
Power requirements | 380V, 50/60HZ three-phase, maximum 40A |
Control System | Siemens PLC + IPC |
Equipment power | |
Coolant | Antifreeze or distilled water ≤20ºC |
Pressure: | 0.2~0.4Mpa |
coolant flow rate | >100L/min |
Water tank water capacity | ≥60L |
Inlet water temperature | ≤20ºC |
Air source | 0.4MPa≤air pressure≤0.7MPa |
Power supply | single-phase three-wire system 220V, 50Hz |
Voltage fluctuation range | single phase 200~230V |
Frequency fluctuation range | 50HZ±1HZ |
Equipment power consumption | about 5KW; grounding resistance ≤4Ω; |
Host system | including vacuum chamber,main frame, control hardware and software |
Nitrogen pipeline | Nitrogen or nitrogen/hydrogen mixture can be used as process gas |
Formic acid pipeline | Bringing formic acid into the process chamber via nitrogen |
Water cooling pipeline | cooling the upper cover, lower cavity and heating plate |
Water cooler | Provide continuous water cooling supply to equipment |
Vacuum pump | Vacuum pump system with oil mist filtration |
Temperature | 10~35ºC |
Relative humidity | ≤80% |
The environment around the equipment is clean and tidy, the air is clean, and there should be no dust or gas that can cause corrosion of electrical appliances and other metal surfaces or cause conduction between metals. |