| After-sales Service: | 1 Year |
|---|---|
| Function: | Abrasion Resistance |
| Certification: | CE |
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| PLASMA source | RF | RF | |
| power | ICP | 1000w | 1000w |
| BIAS | 600w(option) | 600w(option) | |
| Applicable scope | 4~8inch | 4~8inch | |
| Single processing slice count | 1 | 2 | |
| Appearance dimensions | 1080x1840x1800mm | 1340x2050x1800mm | |
| System control | Industrial control system | Industrial control system | |
| Automation level | automatic | automatic | |
Simultaneously loading: 4-crystal boat loading platform
High debonding rate: high-density plasma, fast debonding rate
Stability: High reproducibility after plasma treatment
Remote plasma: Remote plasma with low ion damage to wafers
Special software: independently developed software, intuitive process animation, detailed data and records
Uniformity: Plasma can control pressure and temperature through butterfly valves
Safety factor: Low plasma reduces damage to product discharge
After sales service: fast response and sufficient inventory
Dust control: meets customer requirements
Core technology: With nearly 30% or more R&D team members, the core components used are independently developed, reducing the risk of material shortages due to any sanctions
If you want to konw more, please contact our engineer
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