Seminconductor Equipment Microwave Plasma Cleaning Machine Plasma Cleaner Icp Plasma Glue Remover

• After-sales Service: 1 Year
• Function: Abrasion Resistance
• Certification: CE
• Warranty: 12 Months
• Automatic Grade: Semiautomatic
• Installation: Vertical
• Model NO.: 0
• Driven Type: Electric
• Mould Life: >1,000,000 Shots
• Weight: 800
• Applicable Scope: 4~8inch
• Single Processing Slice Count: 1 and 2
• System Control: Industrial Control System
• Automation Level: Automatic
• Transport Package: Minder-Hightech
• Specification: 1080x1840x1800mm/1340x2050x1800mm
• Trademark: minder-hightech
• Origin: China

Product Description

Product Description

Product Parameters

 

PLASMA source		RF	RF
power	ICP	1000w	1000w
	BIAS	600w(option)	600w(option)
Applicable scope		4~8inch	4~8inch
Single processing slice count		1	2
Appearance dimensions		1080x1840x1800mm	1340x2050x1800mm
System control		Industrial control system	Industrial control system
Automation level		automatic	automatic

 

Application

Simultaneously loading: 4-crystal boat loading platform
High debonding rate: high-density plasma, fast debonding rate
Stability: High reproducibility after plasma treatment
Remote plasma: Remote plasma with low ion damage to wafers
Special software: independently developed software, intuitive process animation, detailed data and records
Uniformity: Plasma can control pressure and temperature through butterfly valves
Safety factor: Low plasma reduces damage to product discharge
After sales service: fast response and sufficient inventory
Dust control: meets customer requirements
Core technology: With nearly 30% or more R&D team members, the core components used are independently developed, reducing the risk of material shortages due to any sanctions
 

Detailed Photos

Company Profile

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