The equipment adopts a stainless steel frame, and the inner and outer sheet metal are stainless steel mirror panels. The bottom of the equipment is equipped with universal casters and horizontal adjustment function. A 3-color signal tower with a buzzer is equipped on the top. The upper part of the equipment is the control system and FFU, the middle part is the process unit, and the lower part is the chemical pipeline system. All parts that come into direct contact with chemicals are made of corrosion-resistant materials, such as SUS304, PP, PTFE, etc. Pneumatic pipelines are made of PU pipes, and chemical pipelines are made of corrosion-resistant PFA pipes. The human-machine operation interface of the device is a 17 inch touch screen, which can achieve functions such as operating the device, setting formulas, and querying logs. The SPIN unit and other process chambers are equipped with.