Vacuum Microwave Plasma Cleaning Machine /Corona Plasma Treatment

• Certification: CE
• Condition: New
• Customized: Customized
• Transport Package: Wooden Crate
• Specification: 1300*2100*1200mm
• Trademark: minder-hightech
• Model NO.: SPMV-100HT
• Origin: Guangzhou
• HS Code: 8015809090
• Production Capacity: 200PCS/Yearpcs/Year

Product Description

SPMV-100HT Vacuum microwave plasma cleaning machine
Microwave plasma cleaning machine, SPMV-100H is a low-pressure microwave plasma cleaning system, which is used for surface pretreatment before SMT, wire bonding, packaging and other processes. The freely moving electrons generate Plasma and enter the magazine where the cavity is located for process cleaning. A large amount of sustained plasma can be generated by applying microwaves at a frequency of 2.45 GHz to a window in the wall of the vacuum cavity. The cavity is suitable for different size cartridges.SPMV-100H can provide fast non-destructive plasma cleaning effect. The plasma cleaning effect of the system is achieved by the generation of activated free radicals through the cartridge.
Features
u  The product placement fixture is flexible and can adapt to irregular products
u  Electrodeless microwave design can meet the processing needs of soft products.
u  No UV radiation
u  Low temperature plasma to avoid thermal damage to the product
u  Electrically neutral plasma, no electrical damage to products
u  Equipped with magnetic fluid rotating frame to increase the uniformity of Plasma treatment
u  Efficient and uniform microwave plasma output to ensure etching efficiency
Industry application
u  PCB/FPC industry: hole drilling and surface cleaning, coverlay surface roughening and cleaning
u  Semiconductor industry: semiconductor packaging, camera modules, LED packaging, BGA packaging, Wire Bond pretreatment
u  Ceramic: packaging, pre-dispensing treatment
u  Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon wafer PN junction removal, ITO film etching
u  Plastic materials: surface activation, ABS surface activation, and other plastic materials cleaning activation
u  Surface cleaning before ITO coating
Technical Parameter
 Equipment Specification

Power Systems	Power Type	Microwave power
	Power	0~1250W
	Frequency	2.45GHz
Vacuum System	Two-stage rotary vane pump (oil pump)	60m3/h(Optional dry pump)
	Vacuum line	All stainless steel pipes, and high-strength vacuum bellows
	Material	Aluminum alloy (customized stainless steel cavity)
	Thickness	25mm
	Tightness	grade welded seal
	Inner Chamber size	450×450×450mm(W×H×D)
	Workspace	6 magazine sections
	ECR	Slotted Magazine and provides ECR enhanced treatment
	Tray rotation	Magnetic fluid control tray rotation
Gas system	Flow range	0~300SCCM
	Process gas circuit	Standard two-way CF4 gas optional
Control System	System control	PLC
	Interactive mode	7 inch touch screen
Other specification	Machine size	1300×2100×1200mm(W×H×D)
	Weight	250KG
	Color	Silver grey

Factory specifications require

AC Power Specifications	Power supply:AC380V,50/60Hz,5-wire,50A
Factory exhaust	Flow :2.0 m³/min
Factory working gas requirements	Flow:1~10 L/min Pressure :3~7 kg/cm² Pipe diameter :6×4 mm Material :PU tube purity :99.99% above
Factory compressed air requirements	Flow:1~10 L/min Pressure :3~7 kg/cm² Pipe diameter :8×5 mm Material :PU tube dew point :-40ºCbelow Particle>0.3μm:10Pcs/ft³

General Specifications

Danger signs	High Voltage Hazard Sign
Use environment	Temperature :15~30ºC Humidity :30~70%
Other considerations	No flammable gas, corrosive gas, explosive or reactive dust Cylinders need to be fixed

Configuration list

No.	Name	Description	Unit	Qty
1	Host	Dimension:1300×2100×1200mm(W×H×D)	Set	1
2	Vacuum chamber	Vacuum chamber Inner size 450×450×450mm(W×H×D)	Set	1
3	Excitation power	Microwave plasma	Set	1
		Frequency:2.45GHz Power 0~1250W
4	PLC	Siemens, Germany,S7-200	Pcs	1
5	Touch screen	MCGS, seven-inch screen	Pcs	1
6	Flowmeter	WAWICK	Pcs	2
7	Vacuum pump set	two-stage rotary vane pump (oil pump):60m3/h	Set	1
8	Vacuum gauge	INFICON	Pcs	1
9	Manual	Operation Manual of Vacuum Microwave Plasma Cleaner SPMV-100H	Set	1

Maintenance

Item	Inspection contents	Life	Inspection frequency
Oil pump	Filter element	Usage time 2000H	15-day
	Pump oil	Usage time 2000H	15-day

Detail
Quality assurance and after-sales service
1,The warranty period is 1 year. During the warranty period, damaged parts shall be replaced free of charge under normal use
2,If the operation is within the safety range that the equipment cannot meet, resulting in the damage of relevant parts, our company will not be liable for compensation
3,In case of equipment damage caused by force majeure disasters such as earthquake, fire, typhoon and tsunami, our company is not responsible for compensation
4,Our company will not be liable for any direct or indirect damage to the equipment caused by non use of original parts
5,If the equipment is damaged or defective due to improper design, our company will replace the defective or damaged parts free of charge
6,After the warranty period, your company shall be responsible for the consumables and service costs required for replacing parts.